DUAL SPIN VALVE MAGNETORESISTIVE THIN FILM OF SUPERIOR THERMAL CHARACTERISTICS AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A magnetoresistive thin film of a superior thermal characteristics in a dual spin valve and a method for manufacturing the same are provided to insert a proper oxide layer to a fixed layer for blocking the diffusion of Mn generated in an antiferromagnetic layer with respect to other layers, thereby improving the thermal characteristics. By forming the oxide layer uniformly by heat treatment, a magnetoresistive rate is increased. CONSTITUTION: In a method for fabricating a magnetoresistive thin film of a superior thermal characteristics in a dual spin valve, the middle portions of magnetic layers positioned between an antiferromagnetic layer and a nonmagnetic layer and contacting the antiferromagnetic layers are oxidized at a proper condition, and magnetic layers are deposited again. The end product is subject to the heat treatment in the vacuum state applied with magnetic fields.