发明名称 |
Substrate container and method of dehumidifying substrate container |
摘要 |
A substrate container includes a container housing having an opening for storing a substrate therethrough and a cover sealingly covering the opening, a fan motor mounted in the container housing for producing a circulating path of air in contact with the substrate in the container housing, and a particle removing filter and a gaseous impurity trapping filter which are disposed in the a portion of the circulating path which extends toward the substrate. A dehumidifying unit for dehumidifying a space in the container housing comprises a solid polymer electrolyte film disposed in the circulating path and voltage applying means for applying a voltage to the solid polymer electrolyte film to decompose water in air flowing in the circulating path thereby to dehumidify a space in the container housing.
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申请公布号 |
US6547953(B2) |
申请公布日期 |
2003.04.15 |
申请号 |
US20010769308 |
申请日期 |
2001.01.26 |
申请人 |
EBARA CORPORATION |
发明人 |
SUZUKI YOKO;TANAKA AKIRA;OKUBO KAZUO |
分类号 |
H01L21/68;H01L21/673;H01L21/677;(IPC1-7):B01D53/26 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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