发明名称 Nanometric scale coherently controlled molecular deposition
摘要 A method for the controlled nanometer-scale deposition of molecules on a surface, by means of coherently controlled optical focusing. The coherent control is conveniently performed by inducing a linear superposition of molecular bound states, by means of electromagnetic fields supplied by an applied laser beam. The optical focusing is conveniently performed by passing a beam of such suitably prepared molecules through another electromagnetic field supplied by a standing wave induced by two interacting laser beams. Altering the characteristics of the laser beams alters the forces operating on the molecules, thus directing them to the desired position on the surface. Selection of the frequencies, intensities, and relative phases of the electromagnetic fields, as well as the geometry of the interaction between the molecular beam and the electromagnetic fields, enables deposition of aperiodic molecular patterns on the surface with a resolution of 10 to 15 nanometers. Such nanoscale focusing of molecules by coherent light can be used for executing nanometric molecular lithographic processes.
申请公布号 US6548124(B1) 申请公布日期 2003.04.15
申请号 US20000531036 申请日期 2000.03.20
申请人 BRUMER PAUL;YEDA RESEARCH & DEVELOPMENT CO. LTD. 发明人 BRUMER PAUL;DEY BIJOY;SHAPIRO MOSHE
分类号 B82B3/00;C23C14/04;G03F7/00;G03F7/20;(IPC1-7):C23C8/00 主分类号 B82B3/00
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