METHOD FOR EXCHANGING WASHING WATER AND APPARATUS THEREFOR

摘要

PROBLEM TO BE SOLVED: To suitably exchange washing water. SOLUTION: The washing water jetted against a substrate 1 is recovered in a washing water tank 10. The washing water is sucked by a washing water pump 20 and used for washing by jetting it against a substrate again. A plurality of suction filters 12 and 14 are formed. When one suction filter 12 suffers clogging, the other suction filter 14 is selected. Water is supplied into the washing tank 10 through the clogged suction filter 12 from a backward washing mechanism to wash the suction filter 12. When the level of the washing water in the washing tank 10 is raised, the washing water is judged to be fouled, and the washing water is discharged while water is supplied to the washing tank 10.