发明名称 Apparatus for wafer-level burn-in and testing of integrated circuits
摘要 In one embodiment, a testing regimen is implemented to reduce test time. Specifically, a structure and method to power up and stabilize all die on the wafer prior to testing each die is implemented. More specifically, parallel powering schemes including die stabilization procedures are used to ready the wafer for testing. A wafer probe tester is indexed from one die to the next for an uninterrupted testing of all die in the wafer subsequent to all die power up and stabilization.
申请公布号 US6548826(B2) 申请公布日期 2003.04.15
申请号 US20010815031 申请日期 2001.03.22
申请人 FENNER ANDREAS A.;THOMPSON DAVID L. 发明人 FENNER ANDREAS A.;THOMPSON DAVID L.
分类号 G01R31/28;G01R31/316;(IPC1-7):H01L23/58 主分类号 G01R31/28
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