发明名称 |
Method of anodically bonding a multilayer device with a free mass |
摘要 |
A method of anodically bonding a multilayer device with a free mass includes positioning a support layer on either side of a free mass structure including a free mass with an electrode on each layer proximate the free mass; connecting both electrodes and the free mass to a node at a floating potential and applying a voltage across the layers and free mass structure to bond at least one of the layers to the free mass structure.
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申请公布号 |
US6548321(B1) |
申请公布日期 |
2003.04.15 |
申请号 |
US20010004145 |
申请日期 |
2001.10.23 |
申请人 |
THE CHARLES STARK DRAPER LABORATORY, INC. |
发明人 |
SAWYER WILLIAM DAVID |
分类号 |
B81B3/00;B81C1/00;G01C19/56;H01L21/683;(IPC1-7):H01L21/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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