| 发明名称 |
Process for producing a first electrode and a second electrode, electronic component and electronic memory element |
| 摘要 |
In a process for producing a first electrode and a second electrode, the first electrode and the second electrode are provided on an electrode material. A cluster ion source is used to apply clusters of the electrode material to the first electrode and/or the second electrode.
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| 申请公布号 |
US6548341(B2) |
申请公布日期 |
2003.04.15 |
| 申请号 |
US20010912039 |
申请日期 |
2001.07.24 |
| 申请人 |
INFINEON TECHNOLOGIES, AG |
发明人 |
SARSTEDT MARGIT |
| 分类号 |
C23C14/32;C23C14/22;H01L21/02;H01L21/203;H01L21/285;H01L21/8242;H01L21/8247;H01L27/04;H01L27/108;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824;H01L21/20;H01L21/44 |
主分类号 |
C23C14/32 |
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