发明名称 |
Array of membrane ultrasound transducers |
摘要 |
The invention relates to an array of ultrasound transducers which each comprise a membrane that is comprised of diamond or diamond-like carbon, a barrier structure, a piezoelectric layer, a first electrode and a second electrode. The barrier structure ensures strong adhesion of the piezoelectric layer to the barrier structure and thus to the device and that the piezoelectric layer only comprises a single phase. In addition, the barrier structure protects the membrane against oxidation/decomposition during the manufacturing process of piezoelectric layer. The invention further relates to an ultrasound transducer.
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申请公布号 |
US6548937(B1) |
申请公布日期 |
2003.04.15 |
申请号 |
US20020137492 |
申请日期 |
2002.05.01 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V. |
发明人 |
KLEE MAREIKE KATHARINE;BRAND HANS-WOLFGANG;KRAFCZYK EGON;LOEBL HANS-PETER;BACHMANN PETER KLAUS |
分类号 |
B06B1/06;(IPC1-7):H01L41/08 |
主分类号 |
B06B1/06 |
代理机构 |
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主权项 |
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地址 |
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