METHOD OF FRYING COATING FILM, METHOD OF FORMING COATING FILM AND COATING FILM FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To uniformly dry a coating film formed on a surface of a substrate by holding coated faces downward in a clean room where downflow of air is formed. SOLUTION: The coating applicator comprises a sucker 19 the surface of which is turned the holding the substrate 20 coated faces downward and a coating application mechanism 22 applying a coating liquid to the substrate 20, and an air flow generator 21 for feeding clean air toward the surface.