发明名称 COATING APPARATUS, COATING METHOD, AND APPARATUS AND METHOD FOR PRODUCING COLOR FILTER
摘要 PROBLEM TO BE SOLVED: To provide a coating apparatus, a coating method, a color filter production apparatus, and a color filter production method capable of providing a high film thickness precision in a coating width direction, causing no solidification and accumulation of a coating liquid in slopes of cut and rising parts and in edges of step parts, preventing stripe-like defects of a coating film even if a large number of substrates are coated one by one. SOLUTION: The coating apparatus has a spraying port extending in one direction for spraying a coating liquid to a substrate positioned oppositely and has a length of the edge face in the longitudinal direction in which the spraying port is formed made longer than the length of the spraying port in the longitudinal direction by 0 to 2 mm in each end side and also has inclined faces continuous to the edge face at 5 to 90 degree to the edge face in both ends sides in the longitudinal direction of the edge face.
申请公布号 JP2003112103(A) 申请公布日期 2003.04.15
申请号 JP20010305177 申请日期 2001.10.01
申请人 TORAY IND INC 发明人 MINOURA KIYOSHI;KITAMURA YOSHIYUKI;KAMIYA KEI
分类号 G02B5/20;B05C5/02;B05D1/26;G02F1/1335 主分类号 G02B5/20
代理机构 代理人
主权项
地址