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发明名称
摘要
申请公布号	JP3395616(B2)	申请公布日期	2003.04.14
申请号	JP19970337868	申请日期	1997.11.20
申请人		发明人
分类号	G01P15/12;G01L9/00;G01L9/04;H01L21/306;H01L29/84;(IPC1-7):H01L21/306	主分类号	G01P15/12
代理机构		代理人
主权项
地址

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