| 摘要 |
PURPOSE: A cleaning device is provided to effectively and completely remove alien substances remaining on a substrate by spraying DI(De-Ionized Water) in a proceeding direction and a reverse direction of the substrate. CONSTITUTION: Transfer rollers(64) are installed in a chamber(60) for transferring a substrate(58) loaded into the chamber. A spraying unit(66) is fixedly installed in the chamber for bidirectionally spraying DI(70) to a surface of the substrate, so that organic matters or particles remaining on the substrate are removed. The spraying unit is formed of a first spraying unit(66a) and a second spraying unit(66b). A DI tank(62) supplies the DI to the spraying unit. An angle control bracket(84) rotates the first spraying unit and the second spraying unit for controlling angles of the first spraying unit and the second spraying unit.
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