| 摘要 |
PURPOSE: A semiconductor manufacturing apparatus is provided to be capable of exactly checking the state of equipment using temperature data. CONSTITUTION: A semiconductor manufacturing apparatus is provided with a diffusion furnace(15) for carrying out a diffusion process, a control system having a memory part(12) for storing a predetermined program used for progressing the diffusion process and a control part(14) for controlling processes of the diffusion furnace according to the predetermined program, and a temperature check alarming apparatus(16) for measuring the inner temperature of the diffusion furnace at exact time and generating alarming sound. At this time, the temperature check alarming apparatus includes a counting part(18) and an alarming part(20).
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