| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a length measuring SEM (scanning electron microscope) to measure a line width and a hole diameter of a semiconductor device by carrying a wafer in a material room in a high vacuum, grasp easily a state of the device in the high vacuum by using the SEM and allow the SEM to be adapted to other vacuum device. SOLUTION: It becomes possible to grasp a state of device in a vacuum by plotting a state of driving system in the vacuum, a vacuum valve, a state in vacuum and a state of electronic optical system in a screen. A time measurement and a comparison with reference data become possible by plotting ON/OFF timing of a variety of sensors, Open/Close timing and the state in vacuum in a timing chart, accordingly it becomes possible to perform a precise determination during performance of maintenance and repair of the device.</p> |
