发明名称 METHOD OF MANUFACTURING A THIN FILM TRANSISTOR
摘要 The invention provides a method of manufacturing an electronic device including a vertical thin film transistor. A layer (8) of semiconductor material is provided over an insulated gate electrode (2). A negative resist (14) is used to define source and drain electrodes (26,28) which extend over the insulating layer (8) up to the step formed therein adjacent an edge (16A) of the gate electrode (2).
申请公布号 KR20030029101(A) 申请公布日期 2003.04.11
申请号 KR20037000224 申请日期 2003.01.07
申请人 发明人
分类号 H01L29/786;H01L51/05;H01L21/336;H01L29/78;H01L51/40 主分类号 H01L29/786
代理机构 代理人
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