LASER OSCILLATOR APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a high quality laser oscillator apparatus by monitoring a pressure difference between the inside of an air fan and a wheeler chamber. SOLUTION: There is provided a difference pressure monitoring apparatus 50 including alarming means for detecting a pressure difference between a blade wheel chamber 8b of an air fan 8 for circulating laser gas and a motor chamber 8c, comparing lower limit values of the pressure differences, and also comparing upper limit values of the pressure differences for alarming when count values upon those comparisons exceed predetermined values.