MEMBER FOR TREATING HYDROGEN OF SILICON WAFER

摘要

PROBLEM TO BE SOLVED: To provide a member for treating hydrogen of a silicon wafer capable of improving the lifetime of the silicon wafer and permitting manufacture at a low cost by preventing impurities from being taken into the silicon wafer at the time of heat treatment in hydrogen. SOLUTION: This is a member for treating hydrogen of a silicon wafer using high-purity synthetic silica glass particles deriving from alkali metal silicate and having the total quantity of metal impurities of 1μg/g or less. The total quantity of metal impurities is desirably 0.5μg/g or less.