发明名称 NITRIDE SEMICONDUCTOR LIGHT EMISSION DEVICE, NITRIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an efficient nitride semiconductor light emitting device, a nitride semiconductor device and a method for manufacturing the same where a characteristic and yield are high by reducing the number of manufacturing processes, time for manufacturing, the bending of a substrate, crystal defect, etc. SOLUTION: The device is provided with the substrate, a first buffer layer formed on the substrate, having a plurality of grooves on its surface and composed of GaN, and a second buffer layer formed on the first buffer layer, having a flat surface by burying the plurality of grooves and composed of GaN obtained by doping Mg.
申请公布号 JP2003110197(A) 申请公布日期 2003.04.11
申请号 JP20010302881 申请日期 2001.09.28
申请人 TOSHIBA CORP 发明人 HARADA YOSHIYUKI;ONOMURA MASAAKI;NUNOGAMI SHINYA
分类号 H01L27/14;H01L21/205;H01L21/338;H01L29/778;H01L29/812;H01L31/10;H01S5/323;H01S5/343;(IPC1-7):H01S5/323 主分类号 H01L27/14
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