发明名称 MANUFACTURING METHOD OF GLASS CERAMIC MULTILAYER BOARD
摘要 PROBLEM TO BE SOLVED: To solve the problem that peeling and minute cracks due to the difference in a thermal coefficient of expansion are generated between a glass ceramic sintering layer resulting from a glass ceramic green sheet and a ceramic powder sticking layer resulting from a green sheet for constraint, when a green laminate for obtaining a multilayer board is set to a state where the glass ceramic green sheet is sandwiched by the green sheet for constraint for attempting to reduce contraction and warpage in a plane direction in burning. SOLUTION: In a green laminate 12 where a glass ceramic green sheet 13 and a green sheet 14 for constraint are laminated at the inside and the outside, respectively, burning is carried out while a cutting groove 9 is being formed in the green sheet 14 for constraint, and a sintering laminate 2 is obtained. The difference in expansion/contraction behavior due to the difference of the thermal coefficient of expansion between a glass ceramic sintering layer 3 and a ceramic powder sticking layer 4 can be generated for each region that is divided by the cutting groove 9, thus relieving stress due to the difference in expansion/contraction behavior.
申请公布号 JP2003110238(A) 申请公布日期 2003.04.11
申请号 JP20010300218 申请日期 2001.09.28
申请人 MURATA MFG CO LTD 发明人 MORIYA YOICHI
分类号 B28B11/04;B28B11/00;B28B11/14;H01L21/48;H01L23/12;H05K1/02;H05K1/03;H05K3/00;H05K3/46;(IPC1-7):H05K3/46 主分类号 B28B11/04
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