LONGITUDINAL DIFFUSION/CVD DEVICE AND WAFER MOVING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a longitudinal diffusion/CVD device and a wafer moving method capable of equally dividing moving and mounting positions of monitor wafers by a simple operation in a short time. SOLUTION: In the longitudinal diffusion/CVD device and the wafer moving method, an operator sets various kinds of parameters from an operating panel. When the number of the monitor wafers is one, two and three or more, the moving and mounting positions of the monitor wafers are calculated by a mechanical controller 4 so that the monitor wafers are respectively equally moved and mounted. Further, the moving and mounting data of all the wafers is prepared to carry out a moving and mounting operation in accordance with the moving and mounting data.