| 摘要 |
PROBLEM TO BE SOLVED: To decrease the number of times of loading objects to be processed and unloading them from a load chamber 16 as a load lock chamber. SOLUTION: A loading and unloading device is provided in the load chamber 16 connected to a processing chamber set to a processing environment different from an outer environment, so as to be openable in an airtight state to load and unload substrates 8 in the load chamber 16 and the processing chambers. The loading and unloading device comprises a first conveyor 24 for loading and unloading the substrates 8 by horizontally and linearly conveying the substrates 8 at desired height; a substrate case 20 in which a plurality of stages of substrates 8 can be mounted, and a side surface and a bottom surface overlapping on the convey path of the substrates 8 by the first conveyor 24 are open so as to move the first conveyor 24 from a lower part to an inner part; and a case lifting mechanism 25 for lifting and lowering the substrate case to position the substrate case 20 at an arbitrary height, so that the substrate 8 can be loaded and unloaded horizontally relative to each stage of the substrate case 20. |
