MANUFACTURING METHOD OF IMAGE FORMING DEVICE, IMAGE FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent deformation of a substrate in the conditioning process. SOLUTION: The vacuum chamber 7 comprises inside a substrate deformation suppressing fixture 6 for suppressing the deformation of the member substrate 1015 by fixing the member substrate 1015 at the upper face by electrostatic force and a dummy plate 4 which is a conditioning substrate is arranged opposed to the member substrate 1015 through a dummy frame 5. The high voltage power source is connected electrically to the member substrate 1015 through a current limiting resistance 2 and the dummy plate 4 is grounded. The conductive substrate deformation suppressing fixture 6 is grounded through the vacuum chamber 7. The member substrate 1015 is fixed to the substrate deformation suppressing fixture 6 using the electrostatic force generated by potential difference by impressing high voltage on the member substrate 1015 from the high voltage power source 1.