发明名称 SOLID-STATE IMAGE SENSING DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PURPOSE: To provide a miniaturized solid-state image sensing device at a reduced cost. CONSTITUTION: A semiconductor substrate 10 comprises an image pickup area 14 in which a plurality of optical sensors are arrayed on the surface thereof, and a transparent plate 6 of the same form and the same size as the semiconductor substrate 10 in the plane view is stuck on the surface of the substrate 10. A bonding pad 16 is formed on the circumferential part of the image pickup area on the surface of the semiconductor substrate, and a through hole 26 penetrating from the lower surface of the bonding pad 16 to a rear surface 24 of the semiconductor substrate 10 is formed in the semiconductor substrate 10. The inner surface of the through hole 26 is coated with an insulating film 28, and the rear surface 24 of the semiconductor substrate 10 is coated with an insulating film 30. A through hole 26 is filled with a conductive material 38, and the bonding pad 16 is electrically connected to a copper wiring 34 of a flexible circuit board 8 stuck on the rear surface 24.
申请公布号 KR20030029027(A) 申请公布日期 2003.04.11
申请号 KR20020060068 申请日期 2002.10.02
申请人 SONY CORPORATION 发明人 WATAYA YUKINOBU
分类号 H01L27/14;H01L21/3205;H01L21/768;H01L23/02;H01L23/12;H01L23/52;H01L23/522;H01L27/146;H04N5/225;H04N5/335 主分类号 H01L27/14
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