发明名称 MICROELECTRONIC PIEZOELECTRIC STRUCTURE
摘要 A high quality epitaxial layer of monocrystalline Pb(Zr,Ti)O3 can be grown overlying large silicon wafers by first growing an strontium titanate layer on a silicon wafer. The strontium titanate layer is a monocrystalline layer spaced apart from the silicon wafer by an amorphous interface layer of silicon oxide.
申请公布号 KR20030029114(A) 申请公布日期 2003.04.11
申请号 KR20037001102 申请日期 2003.01.24
申请人 发明人
分类号 H01L41/08;B32B9/00;H01L21/02;H01L21/316;H01L21/8246;H01L27/105;H01L41/18;H01L41/187;H01L41/22;H01L41/24 主分类号 H01L41/08
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