SUSCEPTER

摘要

PROBLEM TO BE SOLVED: To obtain a suscepter which does not generate temperature difference in a wafer by increasing thickness of the low temperature area L on the suscepter S focusing on that eddy current loss is proportional to thickness of suscepter S and is inversely proportional to a specific resistance thereof. SOLUTION: The suscepter S can obtain a flat intra-surface temperature distribution by providing the region which is thicker than the internal region at the outer most circumferential region in order to make larger the eddy current loss of the external circumferential part than that of the internal region.