| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater, thin and light-weight, with which temperature control is easy and even temperature distribution is easily realized. SOLUTION: The ceramic heater is structured by forming a heater element on the surface or the inside of a ceramic board, and the heater element is at least partly structured in a bent pattern, and at the same time, has sheet resistivity of less than 50 mΩ/sq.
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