ELECTROSTATIC ACTUATOR, MOVABLE ELEMENT USED THEREFOR AND MOLD USED TO MANUFACTURE MOVABLE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator capable of outputting stabilized drive power by suppressing the distortion of a circuit board in the case of manufacturing a stator to the minimum limit. SOLUTION: The electrostatic actuator comprises a stator 30 and a movable element 60 guided by the stator and capable of moving back and forth in a predetermined direction. The stator 30 has a board 50 having a drive electrode formed thereon, and a support member 40 made of a resin to support the board 50 movably in an optical axis direction X so as to control it in the direction Y perpendicular to the optical axis.