| 摘要 |
PROBLEM TO BE SOLVED: To eliminate a limit caused by providing a pin for identifying a substrate housing container, provide a simple structure, and simplify an adjusting work, in a substrate treatment device that is provided with a delivering/receiving part to the substrate housing container to/from the outside and a pin that can be inserted into an identification hole formed in the substrate housing container when the substrate housing container is placed on the delivering/receiving part. SOLUTION: This substrate treatment device is provided with a delivering/ receiving part 24 to deliver and receive a substrate housing container 3 for housing a substrate to/from the outside, and pins 16a and 16b that can be inserted to an identification hole formed in the substrate housing container 3 when the container 3 is placed on the delivering/receiving part 24 are provided vertically movable. |
