| 摘要 |
PROBLEM TO BE SOLVED: To implement high-precision deflection control by calculating 8-pole deflection data of an electric beam pattern forming with high precision and adjusting a deflection amplifier for all of the 8 poles with high precision. SOLUTION: Data based on a forming pattern is converted to an 8-pole deflection signal by a circuit 102, and the deflected signal is applied to an 8-pole electrostatic deflection device 120 via digital/analog converting deflection amplifier 105. The 8-pole converting circuit 104 comprises a digital circuit, and gain connections are individually conducted by digital for connecting the 8-pole deflection signal in digital by a gain corrective circuit 202 so as to correct a beam form. After the gain correction, the deflection signal is converted to an analog signal and applied to the electrostatic deflection device 120.
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