MANUFACTURING METHOD OF ELECTRON EMITTING ELEMENT AND MANUFACTURING METHOD OF ELECTRON SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an electron emitting element that is capable of stabilizing the electron emission characteristics of the electron emitting element by reducing the preparatory drive current If-pre flowing in the electron emitting element at the time of carrying out the preparatory drive process for stabilizing the electron emission characteristics, and a manufacturing method of an electron source. SOLUTION: The manufacturing method comprises a preparatory pre-drive process for impressing a preparatory pre-drive voltage Vpre' having a voltage wave peak value which is lower than the voltage wave peak value Vpre of the preparatory drive voltage that is impressed at the time of preparatory drive process, before the preparatory drive process is impressed.