Laminar restriction device for fluid mass flow rate controller, especially gas with relatively low flow rates, has a conical core that can be axially displaced to easily vary the deflected flow rate

摘要

Laminar restriction device has an annular main channel (1) formed between a conical core (2) and the recess (3) of a bore (4). Axial spacers (5, 5', 5) are provided for axial positioning of the core within the bore to vary the deflected flow rate. Spacers are interposed between the ends of the core and the fluid intake and discharge chambers. The latter are formed by annular gaps provided by rings (11, 11') the openings of which are aligned with the inlet and outlet conduits.