DEVICE AND METHOD FOR LASER ANNEALING

摘要

PROBLEM TO BE SOLVED: To provide a device and method for laser annealing by which the effective exchanging timing of an optical window can be decided by detecting the contaminated state of the window on the incident side of laser light before starting laser annealing. SOLUTION: The laser annealer is provided with a second optical window at the position where the laser light passes through a vacuum vessel in addition to the conventional laser light introducing first optical window. A shutter which prevents the contamination of the second window while the laser annealing is performed is attached to the second window, and a power monitor which measures the power of the laser light is attached to the outside of the vacuum vessel. When the laser annealing is not performed, the contaminated state of the first optical window is discriminated by measuring the power of the laser light transmitted through the second optical window by means of the power monitor.