| 摘要 |
<p>PROBLEM TO BE SOLVED: To precisely detect the accommodated state of wafers without adjusting a relative positional relation between a wafer conveying robot and a mapping device even when a load port is changed. SOLUTION: A hoop carrier 14 is provided for accommodating a plurality of wafers 15 at intervals along a prescribed direction. The hoop carrier 14 is mounted on the load port 12. The port 12 is provided with a pod opener for detachably attaching a closing cover 16 provided in the hoop carrier 14. The mapping device 20 is provided for detecting the accommodated state of the wafers 15 in the hoop carrier 14. The mapping device 20 is provided independently of the load port 12.</p> |
