| 摘要 |
PROBLEM TO BE SOLVED: To smooth operations related to execution of a method for active elimination of vibration of feed-forward system adding a control vibration in 180 deg. out of phase with a vibration transferred from a base to a base-plate 10 by detecting acceleration x0" of the base-plate 10 of an air-spring-style isolator 2 through an acceleration sensor 33 and by adjusting an air pressure of an air spring Sv based on the detected value. SOLUTION: Performance of elimination of vibration which is basically outstanding over a wide frequency range in the both of vertical and horizontal direction is obtained by assembling a gimbal mechanism into a piston 13 of the air spring Sv. The control vibration is added to a top-plate 21 of the isolator 2 by adjusting the air pressure of the air spring Sv with operation control of a servo valve 34. A spring constant K of a vibration transferring path from the base-plate 10 to the top-plate 21 and an attenuation coefficient C are respectively obtained and a feed forward correcting value Uff corresponding to the detected value of the acceleration x0" is set at Uff=α×(Cs+K)/s<2> }×x0" by using a proportionality constantαand a Laplace operator s.
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