| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator in which a movable element can be brought into contact with a stator without increasing the gap between the stator and the movable element. SOLUTION: The electrostatic actuator comprises the stator 20 having a circuit board 40; and the movable element 30 having electrode faces 31, 32 formed on the surface opposed to the board 40, guided to the stator 40, and provided to move back and forth in a predetermined drive direction X. The board 40 has a plurality of drive electrodes 42, extended in the crossing direction to the drive direction oppositely to the element 30 and arranged at intervals along the drive direction, a protective film 45 covering the electrodes 42, and a protruding part 47 protruding to the element 30 side from the film 45 at least at one of the intervals between both end positions in the crossing direction of the electrodes 42.
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