| 摘要 |
PROBLEM TO BE SOLVED: To provide a control apparatus for flow-rate of fluid capable of supplying quickly and correctly fluid of required flow rates to a plurality of flow paths branched from a supply source. SOLUTION: The control apparatus comprises a dumper mechanisms Da, Db and Dc to adjust rates to flow paths A, B and C branched from a blower 12 and flow sensors Sa, Sb and Sc to measure rates of air flows to the flow paths A, B and C, wherein the apparatus comprises a control part 20 to set ratios of a total sum of target rates of fluid flows (Qa, Qb and Qc) to the target rates of fluid flows of the flow paths to target ratios (Qr, Qrb and Qrc), set ratios of a total sum of actual rates of fluid flows (Fa, Fb and Fc) measured respectively by each sensor Sa, Sb and Sc to actual rates of fluid flows of the flow paths to actual ratios and set valve openings of the dumper mechanisms Da, Db and Dc by PID control from deviations between the actual ratios and the target ratios.
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