发明名称 SEMICONDUCTOR WAFER IDENTIFICATION
摘要 A semiconductor wafer (10), a method of providing information on a semiconductor wafer (10), a system of semiconductor wafer (10) and reading means, and a method of reading information from a semiconductor wafer (10) are provided. The invention is characterized by magnetic means (14) as information carrier and the respective magnetic sensors (26) to read such information.
申请公布号 WO03030081(A2) 申请公布日期 2003.04.10
申请号 WO2002US29073 申请日期 2002.09.12
申请人 MOTOROLA, INC. 发明人 MAUTZ, KARL;ZEAKES, JASON
分类号 G06K19/06;H01L21/00;H01L21/677;H01L23/544 主分类号 G06K19/06
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