ALUMINUM ALLOY THIN FILM AND WIRING CIRCUIT HAVING THE THIN FILM AND TARGET MATERIAL FOR FORMING THE TIN FILM

摘要

A carbon−containing aluminum alloy thin film,characterized in that it comprises at least one element of nickel,cobalt and iron in an amount of 0.5 to 7.0 atomic % and carbon in an amount of 0.1 to 3.0 atomic %,the balance of the alloy being aluminum;and the carbon−containing aluminum alloy thin film which further comprises silicon in an amount of 0.5 to 2.0 atomic %.The aluminum alloy thin film has an electrode potential similar to that of an ITO film,is free from the diffusion of silicon,exhibits a low specific resistance,and is excellent in heat resistance.