METHOD AND APPARATUS FOR ANALYZING MANUFACTURING DATA
摘要
A method for data mining information obtained in an integrated circuit fabrication factory ("fab") that includes steps of: (a) gathering data from the fab from one or more of systems, tools, and databases that produce data in the fab or collect data from the fab; (b) formatting the data and storing the formatted data in a source database; (c) extracting portions of the data for use in data mining in accordance with a user specified configuration file; (d) data mining the extracted portions of data in response to a user specified analysis configuration file; (e) storing results of data mining in a results database; and (f) providing access to the results.
申请公布号
WO03012696(A9)
申请公布日期
2003.04.10
申请号
WO2002US24114
申请日期
2002.07.29
申请人
APPLIED MATERIALS, INC.
发明人
SMITH, SHAWN, B.;GRIGSBY, BRIAN, P.;PHAM, HUNG, J.;DAVIS, TONY, L.;YEDATORE, MANJUNATH, S.;CLEMENTS, WILLIAM, R., III