发明名称 |
Capacitance type displacement detection apparatus |
摘要 |
A transmission electrode <bold>10 </highlight>and ode 12 are placed in an electrode section of a senced in an electrode section of a sensor and are catrode placed on an opposed scale. Capacity change n an opposed scale. Capacity change between the trption electrode caused by displacement is detectedreception electrode caused by displacement is deteignals different in phase are supplied to the tranght>. A plurality of signals different in phase arlike a zigzag using an upper layer and a lower lay/highlight>. The signal lines are wired like a zigthe detection electrode 12 are made substantially distances between the signal lines and the detectative to the detection electrode 12. ntially equal for making uniform the crosstalk amounts relative to the detection electrode <bold>12. </highlight>
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申请公布号 |
US2003067309(A1) |
申请公布日期 |
2003.04.10 |
申请号 |
US20020291630 |
申请日期 |
2002.11.12 |
申请人 |
MITUTOYO CORPORATION |
发明人 |
NAKAYAMA KENICHI;HASEGAWA TOSHIHIRO;TOMINAGA ATSUSHI |
分类号 |
G01D5/241;(IPC1-7):G01R27/26 |
主分类号 |
G01D5/241 |
代理机构 |
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代理人 |
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地址 |
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