发明名称 Charge pump or other charge storage capacitor including PZT layer for combined use as encapsulation layer and dielectric layer of ferroelectric capacitor and a method for manufacturing the same
摘要 A charge storage capacitor includes a bottom electrode, a dielectric layer formed on the bottom electrode, and a local interconnect electrode formed on the dielectric layer, wherein the dielectric layer is an encapsulation layer, and a ferroelectric memory cell includes the charge storage capacitor.
申请公布号 US2003067027(A1) 申请公布日期 2003.04.10
申请号 US20020288317 申请日期 2002.11.04
申请人 FOX GLEN;EVANS THOMAS 发明人 FOX GLEN;EVANS THOMAS
分类号 H01L21/02;(IPC1-7):H01L27/108 主分类号 H01L21/02
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