METHOD OF CHARACTERISING AN IMPLANTATION STEP IN A SUBSTRATE OF MATERIAL

摘要

The invention relates to a method of characterising, ex-situ, the implantation dose of at least one species in a substrate. The inventive method is characterised in that it comprises: an annealing step that is intended to cause the blistering of the species in the implanted substrate; a substrate surface image acquisition step; and an image processing step. The implantation dose characteristics are deduced from the image processing step.