| 摘要 |
The invention relates to a method for sorting wafers (W) of a chip production operation from an initial state into an end state, the wafers (W) being at least partly identifiable on the basis of an information carrier as elements of a finite sequence, and in the initial state the wafers (W) being arranged in any desired sequence in compartments (s) of a holding device (H) and in the end state each wafer (W) being arranged as far as possible in accordance with its position in the sequence in the compartments (s) of the holding device (H), characterized in that a) a first wafer (W1) is removed from a first compartment (s2) of the holding device (H), b) the information carrier of the first wafer (W1) is read by a reading device (A) to determine the position of the first wafer (W1) in the sequence, c) subsequently, a second wafer (W2) is removed from a second compartment (s1) which corresponds to the position of the first wafer (W1) in the sequence, d) the first wafer (W1) is moved into the compartment (s1) which corresponds to its position in the sequence. The device according to the invention serves for carrying out the method according to the invention.
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