| 摘要 |
A conductive supporting plate is laminated on an elastic film. The conductive supporting plate is partly removed to form an elastic region in which first island portions and second island portions are remained on the elastic film while being electrically insulated from each other. A head case is formed with a chamber which forms an opening at a first end face joined to the supporting plate. In a vibrator unit, a plurality of piezoelectric vibrators are arranged on a fixing plate. The piezoelectric vibrators include a pair of non-deformable vibrators and deformable vibrators arranged between the non-deformable vibrators. The vibrator unit is accommodated within the chamber such that each tip end face of the deformable vibrators is abutted onto one of the first island portions, and each tip end face of the non-deformable vibrators is abutted onto one of the second island portions. Each of the second island portions define a first recess at a portion of the elastic region where opposes to corners of the opening at the first end face of the head case, to receive an adhesive used to bond the vibrator unit to the head case and overflowed from the opening.
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