| 摘要 |
A reticle storing movable rack system comprises a plurality of flat tracks fixedly secured to a floor. There is provided a plurality of rows of storage units. Each row has a plurality of independent racks interconnected with each other, which racks are adapted to be moved as a single row along the flat tracks. A user engageable drive assist mechanism is provided to move the rows. Each of the racks comprises shelves with plurality of cells for housing reticles. The racks are electrically grounded, and the cells are made metallic and electrically connected to the racks to secure electrostatic shielding properties. With the purpose of imparting antiseismic properties to the system, the shelves are made with a slope inside the racks, the slope being preferably about 8°.
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