Micromechanical component used in the production of a pressure sensor comprises a bellows-like structure with lateral twists parallel to both main surfaces of the component

摘要

Micromechanical component comprises a bellows-like structure (11) with lateral twists parallel to both main surfaces of the component. An Independent claim is also included for a pressure sensor comprising the micromechanical component partially arranged on a membrane (1). Preferred Features: The bellows-like structure comprises a thin section (12) which extends over the whole thickness of the structure and is formed between two recesses in the structure. The structure is made from silicon. The bellow-like structure is produced by sawing or anisotropic etching, especially plasma etching, trench etching or KOH etching.