Apparatus for producing aluminum nitride

摘要

A reactor includes a cylindrical chamber having an opening transverse to an axial direction of the cylindrical chamber, a cover movable along the axial direction between an open state in which the cover is away from the opening of the cylindrical chamber, and a closed state in which the cover seals the opening of the cylindrical chamber, and an actuator unit connected to said cover. An apparatus for producing aluminum nitride including the reactor is also disclosed.