发明名称 Tuning fork gyroscope
摘要 A tuning fork gyroscope typically including at least one proof mass with an upper sense plate disposed above the proof mass and a lower sense plate disposed below the proof mass and means for sensing changes in the nominal gaps between the sense plate and the proof mass and for outputting a signal indicative of the gyroscope angular rate.
申请公布号 US2003066351(A1) 申请公布日期 2003.04.10
申请号 US20020264887 申请日期 2002.10.04
申请人 WEINBERG MARC S.;KOUREPENIS ANTHONY S.;SAWYER WILLIAM D.;BORENSTEIN JEFFREY T.;CONNELLY JAMES H.;DUWEL AMY E.;LENTO CHRISTOPHER M.;COUSENS JAMES R. 发明人 WEINBERG MARC S.;KOUREPENIS ANTHONY S.;SAWYER WILLIAM D.;BORENSTEIN JEFFREY T.;CONNELLY JAMES H.;DUWEL AMY E.;LENTO CHRISTOPHER M.;COUSENS JAMES R.
分类号 B81B3/00;B81C1/00;G01C19/56;H01L21/683;(IPC1-7):G01C19/00 主分类号 B81B3/00
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