发明名称 Under bump metallization pad and solder bump connections
摘要 The present invention relates to an improved method of forming and structure for under bump metallurgy ("UBM") pads for a flip chip which reduces the number of metal layers and requires the use of only a single passivation layer to form, thus eliminating a masking step required in typical prior art processes. The method also includes repatterning bond pad locations.
申请公布号 US2003067073(A1) 申请公布日期 2003.04.10
申请号 US20020288419 申请日期 2002.11.06
申请人 AKRAM SALMAN;WOOD ALAN G. 发明人 AKRAM SALMAN;WOOD ALAN G.
分类号 H01L21/60;H01L23/485;(IPC1-7):H01L21/44;H01L23/52;H01L29/40;H01L23/48 主分类号 H01L21/60
代理机构 代理人
主权项
地址