| 摘要 |
<p>The invention provides a work holding disk having a work holding disk main body for holding one main surface of work to mirror-grind the other main surface of the work, wherein the work holding surface of the work holding disk is formed with microscopic pores. The invention also provides a grinding work holding disk having a work holding disk main body formed with a through-hole for holding the work by vacuum suction, the holding surface of the holding disk main body being coated with resin, wherein the thermal expansion coefficient of the resin that coats the holding surface is not more than 3 × 10-5/K.</p> |
